13, 1800228 (2019). As the modulation bandwidth is primarily related to the optical Q of the device, it can be engineered flexibly for different application purposes, simply by choosing device with appropriate optical Q. Publishers note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. The inset shows the S11 reflection scattering parameter for both devices. Opt. Herein, we review the progress in microstructure and domain. On the other hand, the full-swing extinction ratio of the EOMs is primarily determined by the external coupling of light to the modulator cavity. 5, 425429 (2011). 7, 10031013 (2019). Heterogeneous microring and Mach-Zehnder modulators based on lithium niobate and chalcogenide glasses on silicon. Koeber, S. et al. They are close to those of a conventional Mach-Zehnder modulator with a straight modulation section. [2304.13760] Reliable micro-transfer printing method for heterogeneous In the meantime, to ensure continued support, we are displaying the site without styles Open Access Status and potential of lithium niobate on insulator (LNOI) for photonic integrated circuits. C.W., M.Z., X.C. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in Nature 556, 483486 (2018). PubMed Zhang, M. et al. and M.L. a, b, Schematics of the cross-sections of thin-film (a) and conventional (b) LN modulators. The high quality of device fabrication as indicated by the device images implies high performance of the EOM, as we will show below. BER versus OSNR for the three modulation schemes at 70Gbaud. Appl. Phys. Photon-level tuning of photonic nanocavities. Consequently, the transmission spectrum transforms into a multi-resonance spectrum (Fig. Lithium niobate photonic-crystal electro-optic modulator, https://doi.org/10.1038/s41467-020-17950-7. 4, e255 (2015). In the past decade, photonic-crystal EOMs have been developed on various material platforms such as silicon32,33,34, GaAs35, InP36, polymers37,38, ITO39, etc. To show the electro-optic tuning property, we applied a DC voltage to the chip and monitored the cavity transmission spectrum of the \({\mathrm{{TE}}}_{01}^{0}\) mode. Express 22, 2862328634 (2014). 3, 301313 (2009). M.L., U.A.J., and S.X. Aoki, M. et al. Jin, S., Xu, L., Zhang, H. & Li, Y. LiNbO3 thin-film modulators using silicon nitride surface ridge waveguides. To date, it remains an open challenge in realizing a high-speed and energy-efficient modulator at the wavelength scale on the monolithic LN platform. Nature 528, 534538 (2015). Low V silicon photonics modulators with highly linear epitaxially grown phase shifters. b, c Electro-optic tuning efficiency and optical quality factor of the device as a function of Gap and tw, simulated by the FEM method. Article J. Lightwave Technol. Photon. Such a supercell of metasurface is constructed by two kinds of finite-sized arrays possessing different topological properties via the generalized two-dimensional (2D . 6, 6982 (2000). Wang, J. et al. Shao, L. et al. The devices exhibit a significant tuning efficiency up to 1.98 GHz V1, a broad modulation bandwidth of 17.5 GHz, while with a tiny electro-optic modal volume of only 0.58 m3. As an example, a gap of ~1.5m would not only result in an optical Q of ~5000 that helps increase the operation bandwidth to ~45GHz, but also improve the electro-optic tuning efficiency by about 31% to 2.38GHzV1, as highlighted in blue in Fig. Shambat, G. et al. ADS In most cases, lasers are stand-alone devices, external to the modulators, making the whole system more expensive and less stable and scalable. Nature 562, 101104 (2018). Abstract. 16, 18 (2018). B. Attojoule optoelectronics for low-energy information processing and communications. Nat. Reference [18] has recently emerged as a promising approach to realize integrated EO modulators with stronger optical connement and high EO efciencies while occupying a smaller footprint [4], [19]-[22]. 8b, c. However, Fig. We believe this is the first LN EOM ever reported with such combined device characteristics and modulation performance. Its low operating voltage makes it convenient to use a function generator as the driver. & Fan, S. Synthetic space with arbitrary dimensions in a few rings undergoing dynamic modulation. HR00112090012. On chip, the lasers sit in small wells or trenches etched into the lithium niobate and deliver up to 60 milliwatts of optical power in the waveguides fabricated in the same platform. Extended Data Fig. performed numerical simulations. a Recorded transmission spectrum of the EOM cavity as a function of applied DC voltage from 0 to 4.5V, with a voltage step of 0.5V. b Recorded resonance shift as a function of applied DC voltage, where the experimental data are shown in black dots and the blue line is a linear fitting to the data. In summary, we have demonstrated high-speed LN EOMs with a broad modulation bandwidth of 17.5GHz, a significant tuning efficiency up to 1.98GHzV1, and an electro-optic modal volume as small as 0.58m3. Optica Publishing Group on Twitter: "View Spotlight analysis of the # Rouvalis, E. Indium phosphide based IQ-modulators for coherent pluggable optical transceivers. Witmer, J. D. et al. 5 Comparison of integrated and conventional LN modulators. The full cross-section is shown in d. c Dispersion property of the partially etched LN photonic-crystal nanobeam, simulated by the finite element method (FEM). We used two cascaded travelling wave phase modulators for spatiotemporal modulation and a racetrack resonator as a wavelength filter to suppress the sidebands of the reverse propagating . Lithium niobate photonic crystal wire cavity: realization of a compact electro-optically tunable filter. The elliptical hole has dimensions of hx=270nm and hy=490nm, and a fully etched depth of 300nm. 14 April 2023, Light: Science & Applications 101, 151117 (2012). The electro-optic modulation demonstrated in the previous section indicates the potential high-speed operation of the EOMs. Optica 1, 112118 (2014). However, negligible degradation observed between Fig. Extended Data Fig. Applied Physics, Optics / Photonics, Tiantsai Lin Professor of Electrical Engineering, Leah Burrows 8, 701705 (2014). The red column represents the parameter design used for the EOMs demonstrated in the main text. Rev. Nozaki, K. et al. 1f), so as to take the advantage of the largest electro-optic component r33 of LN. 1e) to enable a partial reflection/transmission, with the hole number optimized for a critical coupling to the cavity. 1a), where an injector section (Fig. Nat. Sorting out light. 41, 57005703 (2016). To obtain Dynamically tunable single-/dual-band of the graphene absorber with a 6, 488503 (2012). The flexible electro-optic modulation shown here may offer a convenient method for controlling the spectrotemporal properties of photons inside the cavity and for creating exotic quantum states48 that are crucial for quantum photonic applications. Lithium Niobate Phase Modulators - Phase Sensitive Innovations We realize an intensity modulator of 12.5 mm long modulation section, which exhibits a low half-wave voltage of 1.7 V and a large 3 dB modulation bandwidth of >70 GHz. Opt. PSI offers ultra-high-speed lithium niobate phase modulators. Photonics 11, 5357 (2017). Figure 1: Dual-drive system layout The modulators are manufactured upon a commercial x-cut lithium niobate on isolator (LNOI) wafer (NANOLN) with a thin-film LN thickness of 500 nm, which is bonded to a buried silica (SiO 2) layer on a 500-m-thick silicon (Si) substrate. Lett. High-performance and linear thin-film lithium niobate Mach-Zehnder modulators on silicon up to 50 GHz. The large metal pads (highlighted in blue box) are used simply as the contacts for the air-coplanar probe (Formfactor Acp65-A-GSG-100) for applying the RF driving signal (see also the inset of Fig. Thin-Film Lithium Niobate Modulator Sets New Performance Records 35, 14501455 (2017). As such, the photonic-crystal mirror on the right side of the defect cavity is designed to be of 100% reflection, while that on the left side has decreased number of holes (Fig. and M.B. Di Zhu, and Mengjie Yu, from SEAS, Hannah R. Grant, Leif Johansson from Freedom Photonics and Lingyan He and Mian Zhang from HyperLight Corporation. Proc. Here we report high-speed and energy-efficient LN photonic-crystal EOMs, which exhibits a tiny electro-optic modal volume of only ~0.58m3, the smallest among all high-speed LN EOMs ever reported1,13,14,15,16,17,18,19,20,21,22,23,24,25,26, to the best of our knowledge. Lu, H. et al. IEEE J. Sel. Use the Previous and Next buttons to navigate the slides or the slide controller buttons at the end to navigate through each slide. Science 358, 630632 (2017). Wlbern, J. H. et al. Lett. Near-field enhancement of optical second harmonic generation in hybrid 28, 736739 (2016). Phys. Lithium Niobate Modulator - Agiltron Inc. Express 26, 220232 (2018). Xu, Q., Schmidt, B., Pradhan, S. & Lipson, M. Micrometre-scale silicon electro-optic modulator. Here, we fabricate a multimode microring resonator with an intrinsic Q of 6 106, which exhibits a propagation loss 50 times lower than that of a single-mode LN microring fabricated under the same process. The bit-switching energy for NRZ signal is given by \(\frac{1}{4}C{V}_{{\rm{pp}}}^{2}\) (ref. 3, 9194 (2009). On the other hand, lithium niobate electro-optic modulators, the workhorse of the optoelectronic industry for decades9, have been challenging to integrate on-chip because of difficulties in microstructuring lithium niobate. Figure2 shows a fabricated device (see Methods for the details of device fabrication). Figure7a shows the electro-optic modulation response of the device (blue curve), which exhibits a 3-dB modulation bandwidth up to around 17.5GHz. The measured electrical BER is 3.6105, limited by the signal distortion from the electronic circuit. Lithium niobate modulator | Laser Focus World 35, 411417 (2017). 42.70.a. Thank you for visiting nature.com. 100GHz siliconorganic hybrid modulator. Integrated lithium niobate photonics is a promising platform for the development of high-performance chip-scale optical systems, but getting a laser onto a lithium niobate chip has proved to be one of the biggest design challenges, saidMarko Loncar, the Tiantsai Lin Professor of Electrical Engineering and Applied Physics at SEAS and senior author of the study. IEEE J. Sel. increased the EO modulation efficiency to a voltage-length product of 1.75 Vcm using a shallowly etched lithium niobate waveguide. B 97, 104105 (2018). Recently, thin-film lithium niobate (LN) emerges as a promising platform for photonic integrated circuits. For all the recent advances in integrated lithium niobate photonic circuits from frequency combs to frequency converters and modulators one big component has remained frustratingly difficult to integrate: lasers. Lett. The authors declare no competing interests. Nature 528, 534538 (2015). It has a bias control section that integrates with a tap monitor for stable operation. Recently, there have been significant advance in high-Q LN photonic-crystal nanoresonators43,44,45,46, which led to the demonstration of intriguing phenomena and functionalities such as photorefraction quenching43, harmonic generation44, piezo-optomechanics45, and all-optical resonance tuning46. A 100, 043811 (2019). 2, red box) is used primarily for impedance matching to the large metal pad for probe contact, which can be decreased to 3m for a fully on-chip operation36. Light Sci. Ultrahigh-Q lithium niobate microring resonator with multimode waveguide NTT Tech. We propose and demonstrate a Mach-Zehnder modulator in Z-cut lithium niobate thin film (LNTF) with a vertical electric field structure. To characterize the optical and electro-optic properties of the devices, a continuous-wave tunable laser (Santec TSL-510) was launched onto the chip via a lensed fiber. Rao, A. et al. Optica 6, 14981505 (2019). Thin film lithium niobate electro-optic modulator with terahertz operating bandwidth. Get the most important science stories of the day, free in your inbox. Optical and RF characterization of a lithium niobate photonic crystal modulator. MathSciNet The research is published in the journal Optica. the best experience, we recommend you use a more up to date browser (or turn off compatibility mode in This Perspective discusses and compares several different approaches to the design of high-bandwidth, low-voltage electro-optic devices, such as Mach-Zehnder modulators, made using thin-film lithium niobate (TFLN) and strategies for their incorporation as part of a larger photonic integrated circuit (PIC). EDFA, erbium-doped fibre amplifier; FPC, fibre-polarization controller; MZM, MachZehnder modulator (commercial); OSA, optical spectrum analyser; VOA, variable optical attenuator. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/. 314, 317 (2014). Lithium niobate photonic-crystal electro-optic modulator Google Scholar. Wafer-scale heterogeneous integration of thin film lithium niobate on Express 20, 2246522474 (2012). 260-GBaud Single-Wavelength Coherent Transmission over 100-km SSMF https://www.thorlabs.com/newgrouppage9.cfm?objectgroup_id=3948. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems, fully integrated spectrometers, optical remote sensing, and efficient frequency conversion for quantum networks, among other applications. Appl. Ultrafast electro-optic light with subcycle control. The red solid and open circles denote the fundamental and second-order TE-like cavity modes shown in f and g. Our simulations show that there exhibits another mode with eigenfrequency within the band gap (gray open circles). 26, 13321335 (2014). Nat. Input Requirements LiNbO 3 Appl. c, d, Numerically simulated microwave (c) and optical (d) field distributions (both shown in Ez components) in the cross-section of the thin-film modulator. 1e) is still able to produce a well-confined point-defect cavity, with a simulated optical Q of ~105 for the fundamental transverse-electric-like (TE-like) cavity mode, \({\mathrm{{TE}}}_{01}^{0}\), shown in Fig. High-Production-Rate Fabrication of Low-Loss Lithium Niobate Electro 100G/400G LN Modulator. Laser Photonics Rev. As shown in Fig. & Smith, B. J. Bandwidth manipulation of quantum light by an electro-optic time lens. Dong, P. et al. Lithium Niobate Electro-Optic Modulators. Guarino, A., Poberaj, G., Rezzonico, D., GeglInnocenti, R. & Gnter, P. Electro-optically tunable microring resonators in lithium niobate. A 10-Gbit/s lithium niobate intensity module provides chirp-free modulation at 1550 nm. Photonics 13, 8090 (2019). 4, 518526 (2010). 1a). Here, we report an EO lithium niobate metasurface mediated by topological corner states. . & Thomson, D. J. Department of Electrical and Computer Engineering, University of Rochester, Rochester, NY, 14627, USA, Mingxiao Li,Jingwei Ling,Yang He&Qiang Lin, Institute of Optics, University of Rochester, Rochester, NY, 14627, USA, You can also search for this author in The RF driving power is 16mW. Wooten, E. L. et al. Google Scholar. 3 Electrical eye diagram at 100Gbaud. fabricated the device. Poberaj, G., Hu, H., Sohler, W. & Gnter, P. Lithium niobate on insulator (LNOI) for micro-photonic devices. The demonstration of energy efficient and high-speed electro-optic modulation at the wavelength scale paves a crucial foundation for realizing large-scale LN photonic integrated circuits that are of immense importance for broad applications in data communication, microwave photonics, and quantum photonics. Therefore, we expect our devices to have much higher energy efficiency, as will be shown in the following sections. The devices were fabricated on a 300-nm-thick x-cut single-crystalline LN thin film bonded on a 3-m silicon dioxide layer sitting on a silicon substrate (from NanoLN). The modulators have an SMA RF input, which is directly compatible with . Express 27, 1873118739 (2019). M.L., J.L., and Y.H. Broadband modulation of light by using an electro-optic polymer. Therefore, the electrodes can be shrunk to 103m2, which would reduce the capacitance considerably to ~0.27fF (~1.0fF if including the integrated wires36), according to our FEM simulations. Express 26, 1481014816 (2018). Spatio-temporal isolator in lithium niobate on insulator Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. https://doi.org/10.1038/s41586-018-0551-y, DOI: https://doi.org/10.1038/s41586-018-0551-y. Express 27, 1985219863 (2019). To support on-chip integration, light is coupled to the EOM cavity via an on-chip waveguide (Fig. Sun, C. et al. C.W., M.Z. Optica 5, 233236 (2018). Photonics 1, 407410 (2007). Compact MZI modulators on thin film Z-cut lithium niobate Lithium niobate optical modulators: Devices and applications Electro-optically (EO) tunable metasurfaces have received considerable attention owing to their capability for dynamic light field control. has protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. Express 20, 29742981 (2012). Nat. Lithium niobate etching is not required for making the hybrid optical waveguides. Laser. Reed, G. T., Mashanovich, G., Gardes, F. Y. A fully photonics-based coherent radar system. 1 Ultra-high-linearity integrated lithium niobate electro-optic modulators Hanke Feng1, Ke 1Zhang1, Wenzhao Sun , Yangming Ren2,3, Yiwen Zhang1, Wenfu Zhang2,3 & Cheng Wang1* 1Department ofElectricalEngineering&StateKeyLaboratory TerahertzandMillimeterWaves, City University of Hong Kong, Kowloon, Hong Kong, China 2Institute of Optics and Precision Mechanics, Chinese Academy of Sciences . Opt. How Lithium Niobate Modulator Helps in Meeting Telecommunication Needs Rao, A. IEEE Sel Top. 24, 234236 (2012). 2 High-speed measurement set-ups. Harvards Office of Technology Developmenthas protected the intellectual property arising from the Loncar Labs innovations in lithium niobate systems. The authors thank Professor Hui Wu and Professor Wayne Knox for the use of their equipment. Optica 6, 845853 (2019). ADS and A.S. fabricated the devices. Yuan, L., Xiao, M., Lin, Q. 1c), optimization of the photonic potential via an appropriate pattern of lattice constant (Fig. Slider with three articles shown per slide. He, M. et al. Google Scholar. Correspondence to M.L., J.L., and S.X. Nature thanks M. Hochberg and the other anonymous reviewer(s) for their contribution to the peer review of this work. PDF An Integrated Low-Voltage Broadband Lithium Niobate Phase Modulator 8b, c. The data that support the findings of this study are available from the corresponding author upon reasonable request. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. The cavity resonance exhibits a coupling depth of 93%, corresponding to a full-swing extinction ratio of 11.5dB. The sum of all gray curves is showed in red, which is fitted by the theory. 1 Half-wave voltages of devices with different active lengths. The electrodes are designed to have a length of 30m to ensure a full coverage of the applied electric field over the entire photonic-crystal structure. This mode, however, has only negligible perturbation to the dielectric mode due to distinctive spatial symmetry, thus not affecting the quality of the defect cavity mode. To obtain Our traveling-wave design and advanced index-matching technologies enable optical response over the entire millimeter-wave spectrum (up to 300 GHz). For simplicity of testing, the EOM is designed such that light is coupled into and out of the EOM via only one side of the cavity (Fig. In the current EOMs shown above, light is coupled into and out of the EOMs via a same side of the cavity, which is not convenient in practice since a circulator is required to separate the modulated light for the laser input. Publishers note: Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Loncar is a cofounder of HyperLight Corporation, a startup which was launched to commercialize integrated photonic chips based on certain innovations developed in his lab. Nevertheless, there still exists a balance between the driving voltage and modulation bandwidth. Liang, H., Luo, R., He, Y., Jiang, H. & Lin, Q. conceived the experiment. supervised the project. OBrien, J. L. Optical quantum computing. Rev. Essentially, only the 10-m long point-defect cavity requires electric driving to achieve electro-optic modulation. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon. To characterize the performance of high-speed modulation, the majority of the modulated light output was amplified by an erbium-doped fiber amplifier to boost the power, passed through a bandpass filter to remove the amplifier noise, and was then detected by a high-speed detector (New Focus 1024). IEEE J. Quantum Electron. Science 358, 630632 (2017). Photonics 4, 518526 (2010). Optica 4, 12511258 (2017). d Cross-sectional schematic of the EOM structure, where the arrow profile shows the radio frequency (RF) electric field distribution and the color profile shows the optical cavity mode field distribution, both simulated by the FEM method. Photon. Photonics 13, 454459 (2019). A notable decrease of optical Q is not observed until the gap is reduced to below 2.3m. 24, 3400114 (2018). The demonstrated bit rate is currently limited by our PRBS generator (Agilent 70843B) which has a maximum bit rate of 12Gbs1. 3, e173 (2014). However, the dielectric constant of LN is ~28 at a microwave frequency, much larger than that of air. CAS Google Scholar. Thin-film lithium niobate (LN) has recently emerged as a strong contender owing to its high intrinsic electro-optic (EO) efficiency, industry-proven performance, robustness, and, importantly, the rapid development of scalable fabrication techniques. The broad modulation bandwidth of these devices would thus enable high-speed electro-optic switching. A typical design requires a full air cladding to improve the optical quality factor43,45,46. @article{Ghosh2023WaferscaleHI, title={Wafer-scale heterogeneous integration of thin film lithium niobate on silicon-nitride photonic integrated circuits with low loss bonding interfaces}, author={Siddhartha Ghosh and Siva Yegnanarayanan and Dave Kharas and Matthew Ricci and Jason Plant and Paul W. Juodawlkis}, journal={Optics Express}, year . (Credit: Second Bay Studios/Harvard SEAS). This is a typical signature of resonance modulation in the sideband-unresolved regime, where the cavity resonance follows adiabatically the electric driving signal in a sinusoidal fashion, resulting in a broadened average transmission spectrum (Fig. Sign up for the Nature Briefing newsletter what matters in science, free to your inbox daily. Google Scholar. PubMedGoogle Scholar. Now, researchers from the Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS) in collaboration with industry partners at Freedom Photonics and HyperLight Corporation, have developed the first fully integrated high-power laser on a lithium niobate chip, paving the way for high-powered telecommunication systems. This can be changed simply by engineering the photonic-crystal mirror on the other side to function as the output port. b, High-speed data modulation set-up. performed numerical simulations. Quant. With a balance between the optical Q and the electro-optic tuning efficiency, we adopt a design with a 2.1-m gap and a 150-nm-thick wing layer to achieve the performance demonstrated in this paper, which is highlighted in red in Fig. b Detailed transmission spectrum of the fundamental TE-like cavity mode \({\mathrm{{TE}}}_{01}^{0}\) at a wavelength of 1554.47nm, with the experimental data shown in blue and the theoretical fitting shown in red. Thin-lm lithium niobate on insulator (LNOI) platform. Google Scholar. 3). Figure8b, c shows the numerically simulated tuning efficiency and the corresponding optical Q, respectively.
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